KLA-Tencor and Synopsys to Collaborate in Developing New Process Modeling for Real-Time Prediction of IC Performance for Toshiba

According to Toshiba, an important goal of this joint project is to enable improved information sharing between its IC design and process engineers in order to accelerate the company's advanced process development and yield ramp efforts. Toshiba will install the new modeling system at its 300-mm production facility in Oita, Japan, for use in both low- and high-volume SoC manufacturing.

"Mastering parametric yield is essential for enabling successful IC production," stated Shigeru Komatsu, chief knowledge and infrastructure officer of Toshiba Semiconductor. "Since SoC product lifecycles are typically shorter than other devices, less process data can be collected to optimize the manufacturing process, making it all the more imperative that we get our processes right the first time. Having the ability to model device performance based on real-time parametric yield data will allow us to make rapid decisions during production to fine-tune our processes and optimize our yields, as well as ensure we continue to meet our time-to-market requirements. We anticipate that this collaboration between Synopsys and KLA-Tencor -- both of whom are leaders in their respective fields -- will help contribute to the technological and economic success of Toshiba Semiconductor."

As device scaling drives process tolerances ever tighter, minute process fluctuations have an increasing impact on device performance. The sources of these process variations must be identified and controlled to minimize parametric yield loss. For companies like Toshiba, which manufacture a high mix of devices with short production runs, getting processes right the first time mitigates the risk of missing the market window entirely on a new product design.

To address this need, TCAD systems have traditionally been used to simulate, develop and optimize process technologies. However, because these systems are complex and require hours to perform, they have not been widely deployed in day-to-day manufacturing operations. By combining Synopsys' state-of-the-art TCAD models with KLA-Tencor's most advanced yield analysis and reporting system, the two companies have now developed a solution that brings the benefits of process modeling to the daily yield enhancement tasks of fault estimation, root cause analysis, sample planning and device characterization.

"TCAD models have been utilized in leading-edge semiconductor R&D applications for decades," stated Lars Bomholt, group director at Synopsys. "By applying these proven models in manufacturing yield analysis with the help of KLA-Tencor's Klarity ACE XP product, we can provide our customers with a model-based method to relate the many variables in semiconductor device manufacturing to the electrical properties of the final product. As systematic yield concerns continue to increase with each new technology node, the ability to provide these relationships is all the more essential."

Taking only seconds to run, the new compact modeling system will utilize KLA-Tencor's Klarity ACE XP software to identify the symptoms of parametric yield problems, and Synopsys' TCAD multi-variant non-linear models to identify potential root causes. Klarity ACE XP is designed to help chip manufacturers quickly resolve yield issues in the fab and accelerate their ramp-up to entitlement yields. Synopsys' TCAD models provide the mechanism that links process variations with transistor device-performance characteristics.

"Shrinking product lifecycles and increasing complexity in the IC manufacturing process are fueling the need for greater collaboration between design engineers and IC manufacturers to reduce the time needed to optimize parametric yields," stated Ellis Chang, vice president of KLA-Tencor's Defect and Yield Solutions Division. "Toshiba has taken a leadership role in tackling this DFM challenge by implementing a solution that enables them to leverage design expertise into the manufacturing process more effectively. KLA-Tencor is pleased to take part in this significant collaboration with Synopsys to help companies like Toshiba shorten the design cycles for their most advanced products."

About Synopsys:

Synopsys, Inc. is the world leader in electronic design automation (EDA) software for semiconductor design. The company delivers technology-leading semiconductor design and verification platforms and IC manufacturing software products to the global electronics market, enabling the development and production of complex systems-on-chips (SoCs). Synopsys also provides intellectual property and design services to simplify the design process and accelerate time-to-market for its customers. Synopsys is headquartered in Mountain View, California and has offices in more than 60 locations throughout North America, Europe, Japan and Asia. Visit Synopsys online at: http://www.synopsys.com/ .

About KLA-Tencor:

KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in San Jose, Calif., the company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the Nasdaq National Market under the symbol KLAC. Additional information about the company is available on the Internet at http://www.kla-tencor.com/ .

CONTACT: Yvette Huygen, Manager, Public Relations of Synopsys, Inc.,
+1-650-584-4547, or yvette.huygen@synopsys.com; or Dushka Zapata of Edelman,
+1-650-968-4033, or dushka.zapata@edelman.com, for Synopsys, Inc.; or Uma
Subramaniam, Director, Product Marketing Comm. of KLA-Tencor, +1-408-875-5473,
or uma.subramaniam@kla-tencor.com; or David Moreno, Account Director of MCA,
+1-650-968-8900, ext. 125, or dmoreno@mcapr.com, for KLA-Tencor

Web site: http://www.synopsys.com/

Web site: http://www.kla-tencor.com/